最小流量：0.1SCCM 最大流量：5000SLPM
S100-QR快速响应气体层流质量流量计在S100基础上提高快速响应时间，从100ms缩短至20ms,大幅提高流量测量效率，节省工艺成本，精度保持在±1%读数，适用气体快速波动下的流量精确测量。
PIPG-S101-QR-00-0500 | 0.5 SCCM
PIPG-S101-QR-01-0001 | 1 SCCM
PIPG-S101-QR-01-0002 | 2 SCCM
PIPG-S101-QR-01-0005 | 5 SCCM
PIPG-S101-QR-01-0010 | 10 SCCM
PIPG-S101-QR-01-0020 | 20 SCCM
PIPG-S102-QR-01-0050 | 50 SCCM
PIPG-S102-QR-01-0100 | 100 SCCM
PIPG-S102-QR-01-0200 | 200 SCCM
PIPG-S102-QR-01-0500 | 500 SCCM
PIPG-S102-QR-01-1000 | 1000 SCCM
PIPG-S102-QR-01-2000 | 2000 SCCM
PIPG-S120-02-0005 | 5 SLPM
PIPG-S120-02-0010 | 10 SLPM
PIPG-S120-02-0020 | 20 SLPM
PIPG-S120-02-0050 | 50 SLPM
PIPG-S120-02-0100 | 100 SLPM
PIPG-S120-02-0200 | 200 SLPM
PIPG-S150-02-0500 | 500 SLPM
PIPG-S150-02-1000 | 1000 SLPM
PIPG-S150-02-1500 | 1500 SLPM
PIPG-S150-02-2000 | 2000 SLPM
PIPG-S150-02-3000 | 3000 SLPM
PIPG-S150-02-4000 | 4000 SLPM
PIPG-S150-02-5000 | 5000 SLPM
PIPG-S101-QR-00-0500 | 0.5 SCCM
PIPG-S101-QR-01-0001 | 1 SCCM
PIPG-S101-QR-01-0002 | 2 SCCM
PIPG-S101-QR-01-0005 | 5 SCCM
PIPG-S101-QR-01-0010 | 10 SCCM
PIPG-S101-QR-01-0020 | 20 SCCM
